Application
Yese-mu-imwe dhizaini, yakangwara dhizaini uye chimiro.Scan musoro uye sampuli nhanho yakagadzirwa pamwe chete, yakasimba anti-vibration performance .Precision laser yekuona uye probe alignment device inoita laser kugadzirisa nyore uye nyore.Adapt servomotor kutyaira sampuli inosvika tip manually kana kuti otomatiki, kuti uone kurongeka kwenzvimbo yekutarisisa.Kururamisa uye hombe yemhando yekuchinjisa sampuli inobvumira kuongorora chero nzvimbo inonakidza yesample positioning.CCD yekucherechedza hurongwa hwechokwadi-nguva yemuenzaniso nzvimbo yekucherechedza uye nzvimbo;Shandisa servomotor kuti uwane CCD auto-yakatarisa Electronic system yakagadzirirwa se modular uye iri nyore pakugadzirisa nekusimudzira.Yakabatanidzwa nemaitiro akawanda ekushanda anodzora magetsi kuti awedzere kukura.
Key Features
1. Scan musoro uye sampuli nhanho zvakagadzirirwa pamwe chete, yakasimba anti-vibration performance
2. Precision laser yekuona uye probe alignment device inoita laser kugadzirisa nyore uye nyore;
3. Adapt servomotor kutyaira sampuli yekusvika tipi nemaoko kana otomatiki, kuti uone chaiyo yekutarisisa nzvimbo yekumisikidza.
4. Yakakwirira-yakarurama uye yakakura siyana yekutamisa mudziyo inobvumira kuongorora chero inonakidza nzvimbo yemuenzaniso;
5. Optical observation system yetip cheki uye sampuli yekumisikidza.
6. Electronic system yakagadzirirwa se modular uye iri nyore pakugadzirisa uye kuwedzera kukura.
7. Adopt chitubu chekuzunguza wega, nyore uye kuita kwakanaka.
Tsanangudzo
| Operation | Contact mode, friction mode, | Scan angle | Random |
| Saizi yemuenzaniso | Ø≤90mm,H≤20mm | Muenzaniso kufamba | 0 ~ 20mm |
| Max.scan | X/Y: 20μm, Z: 2μm | Pulse wide yemotor inoswedera | 10±2ms |
| Resolution | X/Y: 0.2 nm, Z: 0.05nm | Optical system | Kuwedzera: 4x, |
| Scan rate | 0.6Hz ~ 4.34Hz | Data points | 256×256,512×512 |
| Kuongorora | XY: 18-bit D/A, Z: 16-bit D/A | Feedback type | DSP digital mhinduro |
| Data sampling | Imwe 14-bit A/D uye kaviri 16-bit A/D akawanda-channel panguva imwe chete | ||
| PC kubatana | USB2.0 | Feedback sampling rate | 64.0KHz |
| Windows | Inoenderana neWindows 98/2000/XP/7/8 | ||
Standard
GB/T 2985-1991
Mapikicha chaiwo
